Cleaning ZETA™+/ MERCURY™+ Series
Unique strip and clean capability in a flexible, economical, and production proven platform from the industry leader in batch spray wet processing.
The ZETA™+/MERCURY™+ spray clean system provides the most effective and flexible batch solution for stripping of photoresist and other films, as well as general clean. Its unique ViPR™+ technology offers the highest performance and lowest cost for resist, silicide and general film stripping needs. High temperature process of ViPR™+ enables rapid removal of various heavy dozed photoresists and other organic films which are the most difficult material to remove with minimum consumable costs and maximum throughput. Delivering efficiency well beyond that achieved by other single wafer clean systems on the market. Post etch clean for both front-end and back-end are also available, as are RCA clean and DHF wet etch. The ZETA™ series has a large number of customer install base across industry. The system is available as fully-automated solution for 300/200mm wafers and as a semi-auto solution for 150/200mm wafers. The MERCURY™+ system is available as a manually operated solution capable of flexibly handling 100-200mm wafers.
* The ViPR™+ technology comes with the ZETA™+ series of systems.
The fully automated ZETA™ +200/300 systems feature automated transfer of wafer batches from incoming FOUPs (300mm) or SMIF pods (200mm) to the process chamber, in a full mini-environment to ensure minimal added particles. The unique, high temperature ViPR™+ process is available for high performance and low cost stripping of resist, silicide, and other films. Batch spray processing provides a much more economical alternative to single wafer resist strip solutions. ZETA™ systems can be configured with up to 8 different chemical inputs to a single, closed chamber, and provide the flexibility to blend chemicals or change mix ratios and temperatures within a recipe. Fully automated systems are also available in 200mm.
For using wafer transport without wafer pods, the ZETA™ SA (Semi-Auto) is also available and features the same chemical capabilities including high temperature ViPR™+ processing. The ZETA™ Semi-auto is also a suitable solution for users of the discontinued MERCURY™ product who are looking to upgrade to better stripping and defect performance. Both 200mm and 150mm wafer batches can be processed by the same machine, with only a simple hardware change.
MERCURY™+ is a best-selling batch spray cleaning system that answers customers’ high-variety, small-lot production needs. Flexible and easy to use, the manually operated system has a small footprint which leads to cost reduction. With only a simple hardware change, the same system can be used to process 200mm, 150mm, and 100mm wafer batches.
Product comparison
 ZETA™＋200/300 |
 ZETA™＋ Semi-auto |
 MERCURY™＋ |
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| Wafer size (mm) |
200 | 300 | 150 | 200 | 200/150/100 |
| Availability | New, Certified used | New, Certified used | New, Certified used | ||
| Wafer per batch | 100 | 50 | 150 | 100 | ー |
| Throughput lilmit (hardware) |
450 | 230 | 675 | 450 | ー |
| On water temp capabililty |
＞220℃ | ＞220℃ | ＞120℃ | ||
| Spray method | Directional atomization | Directional atomization | Directional atomization | ||
| ViPR+ capable | Yes | Yes | No | ||
| Chemical dispense | Fresh single pass or recirculated |
Fresh single pass or recirculated |
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ZETA, ViPR and MERCURY are registered trademarks or trademarks of TEL Manufacturing and Engineering of America, Inc. in US and/or other countries.
